JPH0713781Y2 - エアーフィルター装置 - Google Patents
エアーフィルター装置Info
- Publication number
- JPH0713781Y2 JPH0713781Y2 JP5324790U JP5324790U JPH0713781Y2 JP H0713781 Y2 JPH0713781 Y2 JP H0713781Y2 JP 5324790 U JP5324790 U JP 5324790U JP 5324790 U JP5324790 U JP 5324790U JP H0713781 Y2 JPH0713781 Y2 JP H0713781Y2
- Authority
- JP
- Japan
- Prior art keywords
- frame body
- outer frame
- air filter
- air
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 239000003566 sealing material Substances 0.000 claims description 7
- 230000003749 cleanliness Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000004939 coking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5324790U JPH0713781Y2 (ja) | 1990-05-22 | 1990-05-22 | エアーフィルター装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5324790U JPH0713781Y2 (ja) | 1990-05-22 | 1990-05-22 | エアーフィルター装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0414121U JPH0414121U (en]) | 1992-02-05 |
JPH0713781Y2 true JPH0713781Y2 (ja) | 1995-04-05 |
Family
ID=31574271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5324790U Expired - Lifetime JPH0713781Y2 (ja) | 1990-05-22 | 1990-05-22 | エアーフィルター装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0713781Y2 (en]) |
-
1990
- 1990-05-22 JP JP5324790U patent/JPH0713781Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0414121U (en]) | 1992-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |